The purpose of this study was to analyze the effect of competency development and compensation through motivation on the performance of health workers at the Karanganyar and Kajen District Health Centers. The sample of this study was midwives and nurses at each health center in Karanganyar and Kajen Districts totaling 84 respondents. With SEM PLS analysis tools. The findings of this study are that there is a positive and significant influence between competency and performance; there is a positive and significant influence between compensation and performance and there is a significant positive influence between motivation and performance.